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Ulvac Asher ENVIRO
End Effector
For
the Ulvac Asher ENVIRO System
Fabworx Solutions' End Effector for the Enviro System provides
a more stable blade design that uses three replaceable perfloroelastomer
wafer support pads, which offer a higher coefficient of static
friction between the pad surface and the wafer. This prevents
wafer movement during all robot motions, to provide more accurate
placement. The pad material also reduces particle contamination.
This design provides a significant increase in uptime, accuracy
and overall tool performance.
Features
- Replaceable perfluoroelastomer pads provide exceptional coefficient
of static friction, to eliminate wafer movement during robot
motion.
- Wafer placement accuracy is increased.
- Pad material reduces particle contamination caused by motion
friction.
Contact us for further information.
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