200mm Products
Fabhp
Fabhp High Temp
Fabhp Extented Reach
Fabhp-v
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300mm Products

Fabhp-v300
Fabxp
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End Effectors and Components

E500 Wafer Handler Pick >>
Ulvac Asher ENVIRO™ End Effector
Veeco/CVC GMR End Effector
Novellus Inova® End Effector
Fabxp

     


E500 Wafer Handler Pick

For E220, E500, EHP220, EHP500, EHPi220, EHPi500 and E-200 Implanters
125mm, 150mm and 200mm

Fabworx Solutions' Wafer Handler Pick uses three wafer support pads in place of the adhesive-backed pads supplied by the OEM. These perfloroelastomer pads securely lock into place and will not fall off. In addition, they provide a higher coefficient of static friction between the pad surface and the wafer, preventing wafer movement during robot motion.

Features

  • Adhesive-free design prevents the pads from falling off.
  • Blade thickness and mounting dimensions remain the same.
  • Perfluoroelastomer pads provide exceptional coefficient of static friction, eliminating wafer movement during robot motion.

Contact us for further information.