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Includes Arm, Wrist, End Effector and Hub Bearings
Patented with additional Patents Pending
The Fabworx Solutions Fabhp Robot Upgrade
for Endura® and Centura® platforms is designed for precision
and structural integrity to dramatically improve reliability,
contamination, repeatability/ accuracy, throughput and droop.
The result is higher yield, greater productivity and a rapid return
on investment (LEARN MORE>).
End Effector
- Blade thickness (0.090 in.) offers maximum wafer stability
and provides additional clearance (0.030 in.) for pick motion.
- Three replaceable perfluoroelastomer wafer support pads provide
exceptional coefficient of friction, to eliminate wafer sliding
and associated particles.
- Location of support pads removes topographical stress normally
caused by wafer bowing, which results when supporting a wafer
by its outside diameter.
- Blade material is stress-free 6061 aluminum and is also available
in ceramic for high-temperature applications.
Wrist
- Tighter connection between wrist plate and forearm prevents
droop.
- Interlocking gears with anti-backlash springs are replaced
with patented interconnected stainless steel bands for higher
reliability and elimination of all side-to-side (backlash) motion.
- Ceramic bearings are used for long life and are enclosed to
protect from process deposition and prevent iron particle contamination.
- End effector leveling adjustments are performed at the wrist
for greater alignment accuracy and faster setup/teach time.
- Design eliminates preventive maintenance.
Elbow/Lower Arm
- Precision-machined components and pressed-fit bearings create
a tighter design more resistant to the loads and forces at this
location, to eliminate droop.
- Patented split lower-arm design automatically compensates
for misalignment of the hub’s magnetic rings, to eliminate
premature bearing failure.
- Tighter connection between lower arm and forearm dramatically
reduces bearing wear.
- Bearings are sealed to prevent iron particle contamination.
Hub Bearings/Components
- Bearings are ceramic hybrid with hardened 440 stainless races
to provide long life.
- Bearing shields prevent vacuum grease migration and reduce
particles.
- Patented stainless steel hub spacers provide greater stiffness
against twisting and distorting.
- Upper/lower bearing spacers are pinned together to eliminate
lateral motion.
- A larger spring force is used to insure bearing assembly stability
during motion.
- Entire assembly is tighter and stronger to better support
the arm weight and servo accelerations.
- Droop is no longer measurable, reliability is dramatically
increased and preventive maintenance is eliminated.
DOWNLOAD the PDF DATA SHEET
(requires Acrobat Reader)
Contact us for further information.
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