For Extended Reach and High-Density Plasma
Applications
Includes Arm, Wrist and Hub Bearings
Patented with additional Patents Pending
End Effector
- Designed to use the existing OEM ceramic blade or a Fabworx
blade with perfluoroelastomer wafer support pads. These
pads provide a high coefficient of static friction to wafer
movement during robot motion.
Wrist
- Tighter connection between wrist plate and forearm prevents
droop.
- Interlocking gears with anti-backlash springs are replaced
with patented interconnected stainless steel bands for higher
reliability and elimination of all side-to-side (backlash)
motion.
- Ceramic bearings are used for long life and are enclosed
to protect from process deposition and prevent iron particle
contamination.
- End effector leveling adjustments are performed at the
wrist for greater alignment accuracy and faster setup/teach
time.
- Design eliminates preventive maintenance.
Elbow/Lower Arm
- Precision-machined components and pressed-fit bearings
create a tighter design more resistant to the loads and
forces at this location, to eliminate droop.
- Patented split lower-arm design automatically compensates
for misalignment of the hub’s magnetic rings, to eliminate
premature bearing failure.
- Tighter connection between lower arm and forearm dramatically
reduces bearing wear.
- Bearings are sealed to prevent iron particle contamination.
Hub Bearing/Components
- Bearings are ceramic hybrid with hardened 440 stainless
races to provide long life.
- Bearing shields prevent vacuum grease migration and reduce
particles.
- Patented stainless steel hub spacers provide greater stiffness
against twisting and distorting.
- Spacers are pinned together to eliminate lateral motion.
- A larger spring force is used to insure bearing assembly
stability during motion.
- Entire assembly is tighter and stronger to better support
the arm weight and servo accelerations.
- Droop is no longer measurable, reliability is dramatically
increased and preventive maintenance is eliminated.
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