200mm Products
Fabhp
Fabhp High Temp >>
Fabhp Extented Reach
Fabhp-v
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300mm Products

Fabhp-v300
Fabxp
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End Effectors and Components

E500 Wafer Handler Pick
Ulvac Asher ENVIRO™ End Effector
Veeco/CVC GMR End Effector
Novellus Inova® End Effector
Fabxp

     


For High Temperature Applications
Includes Arm, Wrist and Hub Bearings
Patented with additional Patents Pending

End Effector

  • Design uses the existing OEM blade.

Wrist

  • Tighter connection between wrist plate and forearm prevents droop.
  • Interlocking gears with anti-backlash springs are replaced with patented interconnected stainless steel bands for higher reliability and elimination of all side-to-side (backlash) motion.
  • Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent iron particle contamination.
  • End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time.
  • Design eliminates preventive maintenance.

Elbow/Lower Arm

  • Precision-machined components and pressed-fit bearings create a tighter design more resistant to the loads and forces at this location, to eliminate droop.
  • Patented split lower-arm design automatically compensates for misalignment of the hub’s magnetic rings, to eliminate premature bearing failure.
  • Tighter connection between lower arm and forearm dramatically reduces bearing wear.
  • Bearings are sealed to prevent iron particle contamination.

Hub Bearing/Components

  • Bearings are ceramic hybrid with hardened 440 stainless races to provide long life.
  • Bearing shields prevent vacuum grease migration and reduce particles.
  • Patented stainless steel hub spacers provide greater stiffness against twisting and distorting.
  • Spacers are pinned together to eliminate lateral motion.
  • A larger spring force is used to insure bearing assembly stability during motion.
  • Entire assembly is tighter and stronger to better support the arm weight and servo accelerations.
  • Droop is no longer measurable, reliability is dramatically increased and preventive maintenance is eliminated.

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