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Includes Arms, Wrists, End Effectors and Hub Bearings
Patented with additional Patents Pending
The Fabworx Solutions Fabhp-v 300 Robot
Upgrade is designed for precision and structural integrity to
dramatically improve reliability, contamination, repeatability/accuracy
and throughput. The result is higher yield, greater productivity
and a rapid return on investment.
End Effectors
- Blade thickness (0.125 in.) offers maximum wafer stability.
- Three replaceable perfluoroelastomer wafer support pads provide
exceptional coefficient of friction, to eliminate wafer sliding
and associated particles.
- Location of support pads removes topographical stress normally
caused by wafer bowing, which results when supporting a wafer
by its outside diameter.
- Blade material is stress-free 6061 aluminum and is also available
in ceramic for high-temperature applications.
Wrists
- Tighter connection between wrist plates and forearms prevent
droop.
- Interlocking gears with anti-backlash springs are replaced
with patented interconnected stainless steel bands for higher
reliability and elimination of all side-to-side (backlash) motion.
- Ceramic bearings are used for long life and are enclosed to
protect from process deposition and prevent iron particle contamination.
- End effector leveling adjustments are performed at the wrist
for greater alignment accuracy and faster setup/teach time.
- Design eliminates preventive maintenance.
Elbows
- Precision-machined components and pressed-fit bearings create
a tighter design more resistant to the loads and forces at this
location.
- Tighter connection between lower arm and forearm dramatically
reduces bearing wear.
- Bearings are sealed to prevent iron particle contamination.
Hub Bearings
- Bearings are ceramic hybrid to provide long life and are isolated
to eliminate ball-to-ball collisions, reducing wear and particles.
- Bearings are shielded to prevent vacuum grease migration and
reduce particles.
DOWNLOAD the PDF DATA SHEET
(requires Acrobat Reader)
Contact us for further information.
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