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Cost of Ownership >>
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Wafer Scratching
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Droop
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Throughput
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Cost of Ownership
 Determining
the impact of Cost of Ownership (COO) and Return on Investment
(ROI) is crucial in the high-tech decision-making process. Recently,
Fabworx Solutions analyzed the financial impact of upgrading
a Centura® tool with a Fabhp Robotic
Arm. A cost-of-ownership and return-on-investment model was
generated for several tool performance areas, using actual data
provided by customers. This data was collected from several
upgrades throughout multiple fabs over a period of twelve months.
The results of this analysis revealed that the
Fabhp upgrade provides substantial return on investment. This
return is obtained within several performance improvement areas
that were independently measured and analyzed:
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Reliability is improved, providing a cost
savings on replacement parts, labor and tool downtime.
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Wafer placement repeatability is improved,
reducing backside pressure faults and thus increasing tool
availability.
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Tool throughput is increased, effectively
providing incremental capacity.
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Wafer scratching due to robotic droop is eliminated,
resulting in an immediate yield increase.
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Wafer-handling-induced particles, another
source of yield loss, are greatly reduced.
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