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For
Applied Materials’ Endura® XP Robot, 300 mm
Includes wrist and end effector with O-rings and pins
One year warranty
PATENTS PENDING
End Effector
- Particle performance and wafer placement repeatability are
improved by the use of three replaceable perfluoroelastomer
wafer support pads, which provide a high coefficient of friction
in the lateral direction, eliminating wafer sliding.
- Topographical stress, which results when supporting a wafer
by its outside diameter, is reduced by the location of these
support pads.
- End effector is durable and particle-free; it is machined
from stress-free 6061 aluminum and is also available with a
nickel or alumina-ceramic (Al2O3) coating.
Wrist
- Reliability is increased and backlash is eliminated by the
use of our patented interconnected stainless steel bands.
- Increased bearing life is obtained by the use of ceramic balls
and hardened stainless steel races.
- Bearing covers help reduce particles by keeping mechanical
wear points isolated from the process environment.
- End effector leveling adjustments are performed at the wrist
for greater alignment accuracy and faster setup/teach time.
- Design eliminates preventive maintenance.
DOWNLOAD the PDF DATA SHEET
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Contact us for further information.
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