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Novellus Inova End Effector
For
the Novellus Inova PVD System, 200mm
Ceramic or Aluminum
(Hard Coated also available)
Fabworx Solutions' End Effector for the Inova PVD System provides
a more stable blade design that does not bend (bow) over time
due to long-term heat fatigue.
The design uses three replaceable perfloroelastomer wafer support
pads, which provide a higher coefficient of static friction between
the pad surface and the wafer. This prevents wafer movement during
all robot motions, thereby reducing particle contamination.
Features
- Replaceable perfluoroelastomer pads provide exceptional coefficient
of static friction, eliminating wafer movement during robot
motion.
- Pad material reduces particle contamination caused by motion
friction.
Contact us for further information.
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