New 300mm Fabworx Robots Coming Soon

Fabworx Solutions has developed two new 300mm robots in beta testing this fall. The first robot is a upgrade to the AMAT Producer® robot, and offers significant improvement in wafer placement repeatability, especially when combined with Gravity Edge Hold (GEH) end effector technology. Vibration in the Fabworx arm set has been greatly reduced, and the robot is designed for high-speed operation.

A second new Fabworx robot will be installed for beta testing for a high-temp 300mm process. Fabworx has engineered this robot to eliminate droop and particles. The robot weight has been signficantly reduced to extend hub bearing lifetime, and wafer placement repeatability has been greatly improved.

Both new 300mm Fabworx robots offer improved reliability.

For additional information on new products from Fabworx for 300mm, contact info@fabworx.com, or subscribe to the Fabworx email list.