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Fabworx Solutions products focus on both HP and VHP® mechanical
robot arm upgrades for Endura® and Centura® platforms.
Our end effectors and components are available for several platforms
and OEMs.
Fabworx products provide dramatic improvements in productivity
and yield of existing tools, to:
- Generate fewer particles
- Eliminate droop
- Reduce robot-related wafer scratches
- Increase reliability
- Reduce or eliminate PM
- Improve wafer placement repeatability
- Improve tool throughput (when not process limited)
Learn more about these product improvements on our SOLUTUIONS
page.
Click on the links to the left for product details.
We look to our customers for direction and input on products
and services. To discuss how we can help with your specific
needs, contact our Applications Engineering
Group.
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