300mm wrist assembly
The Fabworx 300mm wrist assembly is an upgrade to the original equipment manufacturer (OEM) 300mm robot and is designed to improve yield and productivity in Endura® and Centura® platforms.
- Patented interconnected stainless steel bands replace interlocking pivot gears, improving reliability and wafer placement repeatability.
- Preventive maintenance (PM) is eliminated.
- Ceramic bearings are used for long life.
- Bearings are enclosed to protect from process deposition and prevent particles from entering the process environment.
- Compatible with the OEM or Fabworx end effector.
- End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup time when used with a Fabworx end effector.
- Includes a 2 year warranty.
The 300mm wrist assembly may be paired with a Gravity Edge Hold™ end effector for potential tool throughput gain.
Wrist assemblies are available for 300mm XP® and VHP® robots.
Patented with Additional Patents Pending