End effectors
Fabworx Solutions offers end effectors that are compatible with Fabworx robots, as well as a line of original equipment manufacturer (OEM) wrist-compatible end effectors designed to improve the performance of your existing tools.
- 150mm, 200mm and 300mm end effectors are available.
- Three replaceable perfluoroeslastomer o-rings with a patented o-ring mounting system provide exceptional coefficient of friction to eliminate wafer sliding and associated particles.
- Location of o-rings removes the topographical stress normally caused by wafer bowing when a wafer is supported by its outside diameter.
- Available in designs suitable for the buffer or transfer chamber.
Fabworx end effectors are available in stress-free 6061 aluminum, alumina-ceramic coatings, and ultra-thin molybdenum.
End effectors made of molybdenum (moly) offer maximum clearance in the cassette.
- Fabworx moly blades have a thickness of only 0.045 in (1.14mm) compared to the standard 0.120 in (3.05mm) OEM end effector.
- Stronger and more durable than thin-profile ceramic blades.
- O-ring system for thin profile end effectors provides exceptional coefficient of friction to eliminate wafer sliding and associated particles.
- Available with or without a shallow pocket.
Fabworx Solutions’ latest end effector technology, Gravity Edge Hold™ (GEH), gently holds a wafer in a pocket with minimal contact, reducing particles caused by wafer sliding.
GEH technology is compatible with 150mm, 200mm and 300mm wafers, is applicable to both vacuum and atmospheric robots, and is designed to retrofit onto most existing robots in most existing tools.
Find out more about Gravity Edge Hold technology.