Fabhp-hdp
The Fabworx Fabhp-hdp robot was designed to improve yield and productivity in 150mm and 200mm Centura® platforms that require an extended reach, such as HDP tools.
Robot speed can be dramatically increased with the Fabhp-hdp robot, often resulting in tool throughput improvements of 5-25%.
Elbow/Lower Arm
- Precision-machined components and pressed-fit bearings create a tighter, stronger design that reduces bearing wear and eliminates droop.
- Bearings are enclosed to prevent particle contamination.
- Patented split lower-arm design automatically compensates for misalignment of the hub’s magnetic rings to eliminate premature bearing failure and ensure smooth operation.
Wrist
- Design eliminates any wrist preventive maintenance (PM) and wrist-related droop.
- Patented interconnected stainless steel bands replace interlocking pivot gears with anti-backlash springs to eliminate side-to-side motion.
- Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particle contamination.
- End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time.
- Hybrid ceramic bearings provide long life and reduce particle generation.
- Integral bearing shields increase race stiffness and help retain lubricant to further reduce particles.
- Patented stainless steel hub spacers are pinned together to eliminate lateral movement and provide greater stiffness against twisting and distorting.
- Overall spring force is increased seven times to keep hub assembly vertically aligned, ensure bearing stability, and reduce robot droop.
- Special brackets lock upper and lower motors in place to eliminate jumping and twisting, improve wafer placement repeatability, and reduce motor sync errors.
End Effector
- Designed to use the existing OEM quartz or ceramic blade, or a Fabworx end effector with perfluoroelastomer o-rings.
- Fabworx end effectors are available in stress-free 6061 bare aluminum, anodized aluminum, or thin-profile molybdenum for maximum clearance in the cassette. Fabworx will work hand-in-hand with the customer to select the appropriate end effector for the process type.
Includes Robot Arm, Wrist, Hub Kit and Choice of End Effector
Patented with Additional Patents Pending