Fabpro

COMING SOON from Fabworx Solutions, the Fabpro robot for 200mm and 300mm Producer® platforms is designed to dramatically improve wafer placement repeatability, eliminate vibration in the arms, improve reliability, and allow for high-speed operation.

The result is higher yield and greater productivity. The Fabpro offers low ongoing maintenance costs at significantly longer rebuild intervals than the original equipment manufacturer (OEM).

Elbow/Lower Arm

• Proven elbow joint design with precision-machined components and pressed-fit bearings creates a tighter, stronger structure to reduce bearing wear and eliminate droop.
• Bearings are enclosed to prevent particle contamination.
• Arm leveling and z-height adjustments are made at the hub for easier, more repeatable setup.
• Honeycomb machining of the arm reduces robot weight, further extending bearing lifetime.

Wrist

• Long, unsupported wrist bands are replaced with a unique rod and band design to eliminate vibration, improve wafer placement repeatability, and extend lifetime.
• Bearings are enclosed to protect from process deposition and prevent particle contamination.
• End effector leveling adjustments are performed at the wrist for greater alignment accuracy and faster setup/teach time.
• Left-right and front-back adjustability in right end effector ensures proper alignment with load locks and heater pedestals.

Hub Bearings

• Hybrid ceramic bearings with hardened 440 stainless steel races provide long life and reduce particle generation.
• Bearing shields help retain lubricant to further reduce particles.

End Effectors

Fabworx end effectors are available in stress-free 6061 bare aluminum, or anodized aluminum.

The Fabpro robot may be paired with Gravity Edge Hold™ end effector technology for additional tool throughput and improved placement repeatability.

Patented with Additional Patents Pending