Hub assembly

Fabworx Solutions offers a line of original equipment manufacturer (OEM)-compatible component products designed to improve the performance of your existing robots.

The Fabhp hub assembly for HP® and HP+ robots improves bearing lifetime and wafer placement repeatability while reducing particles and motor sync errors.

• Hybrid ceramic hub bearings increase product life span and reduce particle generation.
• Integral shields increase race stiffness and help retain lubricant to further reduce particles.
• Patented stainless steel hub spacers provide stiffness against twisting and distorting.
• Increased spring force keeps the hub assembly vertically aligned to ensure bearing stability and reduce robot droop.
• Upper and lower bearing spacers are pinned together to eliminate lateral motion during robot movement and improve wafer placement repeatability.
• Upper and lower motors are locked in place with specifically designed brackets to eliminate motor jumping and twisting and improve wafer placement repeatability.

For VHP® and Producer® 200mm and 300mm robots, Fabworx Solutions offers hybrid ceramic x-style hub bearings which increase product life and reduce particle generation.

• Bearings consist of ceramic load-bearing balls with smaller stainless steel spacer balls for durability.
• Races are made from hardened 440 stainless steel to reduce wear and increase product life.
• Shields help to retain lubricant within the bearing to further reduce particle contamination.
• High-performance, long-life grease is compatible with high-vacuum environments and a wide range of process chemistries.