Reduce particles

Fabworx robots and component products incorporate several design improvements to reduce particle contamination.

Wafers rest on end effectors with three perfluoroelastomer o-rings that provide an exceptional coefficient of friction. O-rings are tighly secured using Fabworx's patented o-ring mounting system, and will not pull out. The wafer rests evenly and securely on o-rings, eliminating wafer sliding and associated nickel and aluminum contamination.

The hub assembly design employs ceramic hybrid bearings with hardened 440 stainless steel races. These bearings have an extremely long life. Integral shields prevent vacuum grease migration, further reducing particles.

Wrist and elbow bearings are enclosed to prevent particles from contaminating the chamber.