|
Fabworx products overcome - and in many cases, eliminate - many
of the common problems faced in today's robotic tools.
Reduce Particles
Fabworx robots incorporate several design improvements to reduce
contamination. Wafers rest on wafer support pads with a high
coefficient of static friction, to eliminate wafer sliding and
associated nickel and aluminum contamination. The hub design
employs ceramic hybrid bearings that are isolated from one another
to eliminate bearing collisions and reduce ferrous particles.
Wrist and elbow bearings are sealed to prevent particles from
contaminating the chamber.
Eliminate Scratching
Fabworx robots use stronger materials and tighter tolerances
to eliminate droop and associated wafer scratching. Hub bearing
spacers are thicker and stronger, and a higher spring preload
is used to create an extremely solid base. Elbow and wrist joints
incorporate pressed-fit bearings. Arm components are rigidly
connected to increase stiffness. Fabworx end effectors are stronger
and less susceptible to heat-induced warping, and their thinner
profile provides more vertical clearance between wafers within
the cassette. Click HERE to view
a Solid State Technology article on scratch reduction results
on the Fabhp Robot.
Increase Repeatability and Accuracy
Fabworx arm assemblies are exceptionally tight, to eliminate
extraneous movement. Reduced backlash and the elimination of
wafer sliding provide better wafer placement repeatability,
reducing backside pressure faults and associated chamber downtime.
Leveling of the end effector is performed at the wrist, for
faster setup and greater precision.
Enhance Throughput
With smoother motion throughout and wafer sliding eliminated,
robot speed can often be safely increased. Arm extend and retract
times of greater than 2 seconds can be reduced to 0.75 seconds,
and rotational movement is similarly improved. This results
in a wafer-per-hour improvement of 3-34%.
Improve Reliability
Fabworx robots are designed for superior reliability. Hub bearings
are a ceramic hybrid, and are isolated to eliminate bearing
collisions and reduce wear. Wrist bearings are ceramic, and
interlocking gears with anti-backlash springs are replaced with
preloaded stainless steel bands that require no preventive maintenance.
The Fabhp Robot exceeds 11 million MCBF, or 4-5 years of typical
production use.
Click on the links to the left for more
details.
For more information, contact us.
|
