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Throughput:
INCREASING FAB CAPACITY
WITHOUT INCREASING THE NUMBER OF TOOLS
Currently, many 200mm fabs in the world are not able to supply
all the wafers they can sell. Increasing fab capacity is required,
but space is limited. In addition, used and refurbished tools
are costly and not as plentiful as they once were.
There is a low-cost alternative for Centura and Endura platforms.
Fabworx Solutions' products have consistently demonstrated an
increase in throughput of 5% to 35% on these tools. Further improvements
in OEE, yield, maintenance cost, and manpower requirements are
also realized. Fabworx products provide an immediate ROI, as they
cost a fraction of an additional process tool. When a group of
tools is collectively upgraded using Fabworx products, the module’s
capacity can often be increased by the equivalent of an entire
tool, without the associated cost, footprint and overhead.
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