Our products integrate seamlessly into your tools.
Fabworx offers an array of products and services for 300mm, 200mm, and 150mm CVD, PVD, Epi, Etch, and RTP process groups.
FABWORX PRODUCT BENEFITS
Safety
Protect workers and tools
Throughput
Enhance tool productivity
Yield
Reduce particles and scrap
Uptime
Increase tool availability
Manpower Reduction
Decrease the number of workers and hours required
ROBOTS, COMPONENTS, AND REFURBISHMENTS
Our Products
-
The Fabpro 2.0 robot improves lifetime, repeatability, and particle protection for the Producer SE robot arm system. Enhanced blade leveling and Z-axis adjustments, enclosed, precision bearings and components, and substantial weight reduction result in a longer-lasting robot and VHP hub lifetime with reduced maintenance needs, greater accuracy, and minimized installation time.
BENEFITS
Manpower Reduction: 4X+ lifetime between preventative maintenance
Uptime: Eliminate unscheduled downs due to robot arm particle failures
Yield: The tightest wafer placement and most robust particle containment eliminates a common yield-killing defect source
-
A drop-in replacement for the 300mm Centura VHP robot arms, the FabHP-V 300 robot utilizes precision, pressed-fit bearings to create a tighter and stronger design that reduces bearing wear and eliminates robot droop. Fabworx's signature particle containment solutions trap any bearing generated particles in the robot’s joints, preventing those particles from contaminating the chamber, and incorporates Fabworx's banded wrist design with precision bearings.
BENEFITS
Manpower Reduction: 3X+ lifetime between preventative maintenance
Uptime: Eliminate unscheduled downs due to robot arm particle failures
Yield: The tightest wafer placement and most robust particle containment eliminates a common yield-killing defect source
-
The Top Mount Hub Plate converts how the robot hub is removed from the Producer SE tool, to allow of easy, quick removal from the top of the tool. No need to loosen screws from underneath the main frame.
BENEFITS
Safety: Never again squeeze a technician through the hot, gas and power line maze underneath the tool
Uptime: Save 2.5 hours per maintenance with the faster removal method
Manpower Reduction: Faster PMs means more quickly on to the next task
-
The FabHT 300 robot increases accuracy, placement repeatability, and robot lifetime on the Centura tool, while reducing robot droop, particle contamination, and side-to-side movement during Epi and RTP processes. Pressed-fit bearings, precision-machined components, particle containment designs, and leveling features provide unsurpassed performance for advanced processes.Integrated wrist-leveling technology delivers precise blade alignment, significantly reducing wafer sliding and improving handling stability.
BENEFITS
Manpower Reduction: 4X+ lifetime between preventative maintenance
Uptime: Eliminate unscheduled downs due to robot arm particle failures, and faster PMs thanks to independent leveling, pitch, roll, and Z-axis adjustment capabilities
Yield: Eliminates die and susceptor killing common mechanical particle sources from the robot
-
A complete upgrade to the 200mm VHP/VHP+ robot arm that eliminates all the mechanical headaches synonymous with the OEM robot arms. Tighter and stronger design reduces bearing wear and eliminates robot droop. Fabworx's signature particle containment prevent bearing generated particles from contaminating the chamber and incorporates Fabworx's banded wrist design with precision bearings. The FabHP-V also provides easy, precision blade leveling design features.
BENEFITS
Manpower Reduction: Install it and forget it. 6+ years lifetime between preventative maintenance.
Uptime: Eliminate unscheduled downs due to robot arm particle, placement, and droop failures.
Yield: The tightest wafer placement, most robust particle containment, and no more wafer-scratching droop.
Throughput: Eliminate robot-limited bottlenecks and see up to 25% more wafers out of the tool.
-
A complete upgrade to the 200mm and 150mm HP/HP+ robot arm that eliminates all the mechanical headaches synonymous with the OEM robot arms. Tighter and stronger design reduces bearing wear and eliminates robot droop. Fabworx's signature particle containment prevent bearing generated particles from contaminating the chamber and incorporates Fabworx's banded wrist design with precision bearings. The FabHP also provides easy, precision blade leveling design features.
The HP/HP+ Hub Assembly Upgrade Kit provides an array of improvements to the HP hub bearings and spring spacer that increase hub assembly vertical alignment and stability. The included motor lock assembly eliminates destabilizing motor jumping and twisting.
BENEFITS
Manpower Reduction: Install it and forget it. 6+ years lifetime between preventative maintenance.
Uptime: Eliminate unscheduled downs due to robot arm particle, placement, and droop failures.
Yield: The tightest wafer placement, most robust particle containment, and no more wafer-scratching droop.
Throughput: Eliminate robot-limited bottlenecks and see up to 25% more wafers out of the tool.
-
End effectors that do it all featuring Fabworx’s patented engineering:
Hold onto the wafer at higher speeds
Improve wafer placement
Reduce backside contact and scratching
Are more durable and won’t break when mishandled
Can be serviced without removing them from the tool, saving downtime.
Models are available for a wide array of tools and always can be easily adapted to new technology.
BENEFITS
Uptime
Yield
Throughput
From robot arm assemblies to robotic and chamber component upgrades to hub refurbishments and more.
If you would like more information or you don't see a solution to your problem, we’d love to hear from you.